Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Koichi Ikeda0
Takeshi Taniguchi0
Takashi Kinoshita0
Masahiro Tada0
Date of Patent
July 22, 2008
0Patent Application Number
105220800
Date Filed
July 14, 2003
0Patent Primary Examiner
Patent abstract
To obtain a micromachine for use as a high frequency filter having a high Q value and a higher frequency band.
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