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US Patent 7391523 Curvature/tilt metrology tool with closed loop feedback control
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Patent
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Date Filed
June 1, 2004
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Date of Patent
June 24, 2008
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Patent Application Number
10858358
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Patent Inventor Names
Charles A. Taylor, II
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Darryl Barlett
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Douglas Perry
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Roy Clarke
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
7391523
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Patent Primary Examiner
L. G. Lauchman
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