Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 24, 2008
Patent Application Number
11363993
Date Filed
March 1, 2006
Patent Primary Examiner
Patent abstract
A chemical liquid valve is arranged such that a diaphragm coupled to a piston rod is brought into/out of contact with a valve seat provided between an inlet port and an outlet port. To achieve a chemical liquid valve providing stable sealing strength, the diaphragm includes an engagement part whose top end is formed in semispherical shape, which is inserted and engaged in a recess of the piston rod so that the engagement part of the diaphragm comes into point contact with an inner wall of the recess of the piston rod. Thus, the piston rod swingably holds the diaphragm.
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