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US Patent 7387915 Method for manufacturing heat sink of semiconductor device

Patent 7387915 was granted and assigned to National Cheng Kung University on June, 2008 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
National Cheng Kung University
National Cheng Kung University
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
73879150
Patent Inventor Names
Yan-Kuin Su0
Jin-Quan Huang0
Kuan-Chun Chen0
Shu-Kai Hu0
Chun-Liang Lin0
Date of Patent
June 17, 2008
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Patent Application Number
114702730
Date Filed
September 6, 2006
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Patent Primary Examiner
‌
Trung Dang
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Patent abstract

A method for manufacturing a heat sink of a semiconductor device is described. In the method, an adhesive tape is provided, wherein the adhesive tape includes a first surface and a second surface on opposite sides, and the first surface of the adhesive tape adheres to a surface of a temporary substrate. At least one semiconductor device is provided, wherein the semiconductor device includes a first side and a second side opposite to the first side, and the first side of the one semiconductor device is pressed and set into a portion of the second surface of the adhesive tape, and the second side of the one semiconductor device is exposed. A thin metal layer is formed on the second side of the semiconductor device and the exposed portion of the second surface of the adhesive tape. A metal heat sink is formed on the thin metal layer. Then, the adhesive tape and the temporary substrate are removed.

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