US Patent 7383723 Detecting particle agglomeration in chemical mechanical polishing slurries
Patent 7383723 was granted and assigned to Intel on June, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 24, 2005
Date of Patent
June 10, 2008
Patent Application Number
11137674
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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