Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 3, 2008
Patent Application Number
11553861
Date Filed
October 27, 2006
Patent Primary Examiner
Patent abstract
A capacitive pressure sensor is provided. The capacitive pressure sensor includes a glass substrate that has a pair of surfaces facing each other. A first silicon substrate has a fixed electrode passing through the glass substrate to be exposed at one surface and a projection passing through the glass substrate to be exposed at the one surface. A second silicon substrate is bonded to the one surface of the glass substrate and is disposed to face the fixed electrode so as to form a cavity between the second silicon substrate and the fixed electrode.
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