Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Long-Hui Lin0
Chia-Yun Chen0
Date of Patent
June 3, 2008
0Patent Application Number
109048730
Date Filed
December 1, 2004
0Patent Primary Examiner
Patent abstract
A plurality of cassettes, each having a plurality of wafers respectively having a first defect information, is selected. Each of the cassettes is then assigned to a corresponding tool having at least one reaction chamber, and the wafers are substantially equally assigned to the reaction chambers. A first process is then performed on each of the wafers in the reaction chamber. Finally, a first defect inspection process is performed on each of the wafers.
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