Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Henry C. Abbink0
Date of Patent
June 3, 2008
0Patent Application Number
110094380
Date Filed
December 9, 2004
0Patent Primary Examiner
Patent abstract
An apparatus comprising at least one multilayer wafer includes a device layer adjacent to a barrier layer, and the device layer includes at least two photoconductive regions separated by an etched channel extending through the device layer. In some instances the apparatus may be an accelerometer having two photodiodes formed on a silicon-on-insulator (SOI) wafer with the photodiodes defined by one or more etched channels extending through the device layer of the SOI wafer. Also disclosed are methods for forming such an apparatus.
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