Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jim S. Nakos0
Bernard A. Roque, Jr.0
Donna K. Johnson0
Jean-Jacques H. Psaute0
Date of Patent
June 3, 2008
0Patent Application Number
100644510
Date Filed
July 16, 2002
0Patent Primary Examiner
Patent abstract
An apparatus for holding a semiconductor substrate comprises a plate having a pocket which holds the substrate, wherein the pocket comprises a lower surface and an inner edge. The inner edge comprises a plurality of members extending radially inward to reduce the area of contact between the inner edge and the substrate. The beveled edge is inclined so that there is an acute angle between the lower surface of the pocket and the beveled edge.
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