Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 6, 2008
Patent Application Number
11281758
Date Filed
November 17, 2005
Patent Primary Examiner
Patent abstract
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device. In some embodiments, analysis of the process control monitors may utilize optical measurements.
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