US Patent 7365375 Organic-framework zeolite interlayer dielectrics

Patent 7365375 was granted and assigned to Intel on April, 2008 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Intel

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7365375

Date of Patent

April 29, 2008

Patent Application Number

11089954

Date Filed

March 25, 2005

Patent Primary Examiner

‌

Fernando L Toledo

Patent abstract

An organic-framework zeolite interlayer dielectric is disclosed. The interlayer dielectric's resistance to chemical attack, its dielectric constant, its mechanical strength, or combinations thereof can be tailored by (1) varying the ratio of carbon-to-oxygen in the organic-framework zeolite, (2) by including tetravalent atoms other than silicon at tetrahedral sites in the organic-framework zeolite, or (3) by including combinations of pentavalent/trivalent atoms at tetrahedral sites in the organic-framework zeolite.