Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ulrich Mantz0
Date of Patent
April 22, 2008
Patent Application Number
10952373
Date Filed
September 29, 2004
Patent Primary Examiner
Patent abstract
A method for the characterization of a film arranged in a plurality of regions on a substrate forms a respective optical measurement at each of a multiplicity of measurement sites in order to determine a respective measurement result, the measurement result being correlated with a film thickness on the substrate. Measurement results that satisfy a predetermined condition, which is satisfied for a measurement result that has been determined at a measurement site within one of the plurality of regions are selected. The film is characterized on the basis of the selected measurement results.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
