Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chiew-Seng Koay0
Kazutoshi Takenoshita0
Martin Richardson0
Date of Patent
April 22, 2008
0Patent Application Number
109822720
Date Filed
November 5, 2004
0Patent Primary Examiner
Patent abstract
Methods, systems and apparatus for producing a variable, known number of nanoparticles of various materials in an expanding mist in a vacuum or enclosure. The configurations allow for this mist of small particles to be produced in bursts, at repetition rates over a wide range of frequencies. The technique produces an isotropically expanding mist of particles. Direct applications of the invention can be used for the development of high power short wavelength incoherent light sources for applications in EUV lithography (EUVL), advanced microscopy, precision metrology, and other fields.
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