Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 15, 2008
Patent Application Number
11124424
Date Filed
May 6, 2005
Patent Primary Examiner
Patent abstract
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
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