US Patent 7357842 Cluster tool architecture for processing a substrate
Is a
Date Filed
April 22, 2005
Date of Patent
April 15, 2008
Patent Application Number
11112281
Patent Inventor Names
Helen R. Armer
0
Robert Lowrance
0
Tetsuya Ishikawa
0
William Tyler Weaver
0
Brian Lue
0
Charles Carlson
0
Chongyang Wang
0
David H. Quach
0
Harald Herchen
0
Jay D. Pinson
0
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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