Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masayuki Yamamoto0
Date of Patent
April 15, 2008
0Patent Application Number
109471700
Date Filed
September 23, 2004
0Patent Primary Examiner
Patent abstract
The present invention provides a method of moving a cutter blade along a circumferential edge of a semiconductor wafer, thereby cutting a protective tape joined to a surface of the semiconductor wafer with a pattern formed thereon for protecting the pattern before the semiconductor is processed. The cutter blade moves in the state where a side face thereof is brought into contact with the circumferential edge of the semiconductor wafer, thereby cutting the protective tape joined to the surface of the semiconductor wafer.
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