Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Emanuel Elyasaf0
Oren Boiman0
Date of Patent
April 8, 2008
0Patent Application Number
107803740
Date Filed
February 17, 2004
0Patent Citations Received
0
0
Patent Primary Examiner
Patent abstract
During mask or reticle inspection, each region is scanned at least twice, using an overlap between each pair of consecutive frames. System contamination and camera blemishes have approximately constant frame coordinates, while mask defects have constant reticle coordinates, but inconstant scan frame coordinates. True defects are detected at different coordinates in consecutive frames with a known displacement therebetween.
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