Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 8, 2008
0Patent Application Number
113242440
Date Filed
January 4, 2006
0Patent Primary Examiner
Patent abstract
A stacked capacitor formed in a capacitor hole includes a bottom electrode, capacitor insulation film and a top electrode. The bottom electrode includes a plurality of islands formed on an underlying insulating film, and a metallic film covering the islands on the underlying insulating film. The larger surface of the bottom electrode increases the capacitance of the stacked capacitor.
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