Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Charles W. Koburger, III0
Mark C. Hakey0
Steven J. Holmes0
Toshiharu Furukawa0
David V. Horak0
Date of Patent
April 1, 2008
0Patent Application Number
113749390
Date Filed
March 14, 2006
0Patent Primary Examiner
Patent abstract
Semiconductor structures and method of forming semiconductor structures. The semiconductor structures including nano-structures or fabricated using nano-structures. The method of forming semiconductor structures including generating nano-structures using a nano-mask and performing additional semiconductor processing steps using the nano-structures generated.
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