Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven J. Holmes0
Toshiharu Furukawa0
Charles W. Koburger, III0
David V. Horak0
Mark C. Hakey0
Date of Patent
March 18, 2008
0Patent Application Number
109055900
Date Filed
January 12, 2005
0Patent Primary Examiner
Patent abstract
Conductive sidewall spacer structures are formed using a method that patterns structures (mandrels) and activates the sidewalls of the structures. Metal ions are attached to the sidewalls of the structures and these metal ions are reduced to form seed material. The structures are then trimmed and the seed material is plated to form wiring on the sidewalls of the structures.
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