Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 18, 2008
Patent Application Number
10671381
Date Filed
September 25, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.
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