Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dongmei Li0
Anthony H. McDaniel0
J. William Medlin0
Robert J. Bastasz0
Date of Patent
March 11, 2008
0Patent Application Number
113613100
Date Filed
February 24, 2006
0Patent Primary Examiner
Patent abstract
The invention provides hydrogen selective metal-insulator-semiconductor sensors which include a layer of hydrogen selective material. The hydrogen selective material can be polyimide layer having a thickness between 200 and 800 nm. Suitable polyimide materials include reaction products of benzophenone tetracarboxylic dianhydride 4,4-oxydianiline m-phenylene diamine and other structurally similar materials.
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