US Patent 7339973 Electrodes for fluorine gas discharge lasers
Patent 7339973 was granted and assigned to Cymer on March, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 26, 2003
0
Date of Patent
March 4, 2008
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Patent Application Number
10672182
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Patent Citations Received
Patent Inventor Names
Timothy S. Dyer
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Bryan Moosman
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James A. Carmichael
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Jiping Zhang
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Richard G. Morton
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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