US Patent 7336012 Motor, robot, substrate loader, and exposure apparatus
Patent 7336012 was granted and assigned to Nikon (Somalia) on February, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 7, 2005
Date of Patent
February 26, 2008
Patent Application Number
11030155
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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