Patent attributes
A substrate-supporting rod (4) includes a resin body (41) and a metal rod (43). The resin body (41) includes a body portion (411) being cylinder-shaped and having a first through hole (413) in a direction of the axis thereof, and a number of shelves (415, 415′) arising from said body portion and extending in parallel away from said body portion at a predetermined pitch. The body portion and the number of shelves are unitary portions of the resin body. The metal rod is received in the first through hole. A projection (4151) is defined on the end of each of shelf to support a substrate (45). The projection is cylindrical in shape of which the diameter is larger than the thickness of the corresponding shelf, and a central axis thereof is substantially perpendicular to a central axis of the body portion.
