Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Martin M. Liphardt1
Date of Patent
February 19, 2008
1Patent Application Number
114951301
Date Filed
July 29, 2006
1Patent Primary Examiner
Patent abstract
Disclosed are systems and methodology for orienting the vertical position, and tilt, of samples, as applied in ellipsometer and the like systems.
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