Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shinji Maekawa0
Date of Patent
February 19, 2008
Patent Application Number
10685380
Date Filed
October 16, 2003
Patent Primary Examiner
Patent abstract
In a semiconductor device having a semiconductor film crystallized by using a metal element, it is an object to provide a technique for reducing the crystal defects in a semiconductor film, and a technique for forming a semiconductor film with high crystallinity by effectively removing impurity metal elements.
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