Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 19, 2008
Patent Application Number
11257071
Date Filed
October 25, 2005
Patent Primary Examiner
Patent abstract
An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing opening. Further, the multilayer second substrate consists of a plurality of layers. The sensor portion (a movable mass body and a fixed electrode) is provided in a sealed cavity portion which is formed between the first substrate and the multilayer second substrate which are opposed to each other.
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