Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 12, 2008
Patent Application Number
10888573
Date Filed
July 9, 2004
Patent Primary Examiner
Patent abstract
The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.
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