Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tatsufumi Kusuda0
Date of Patent
February 5, 2008
0Patent Application Number
111589850
Date Filed
June 22, 2005
0Patent Primary Examiner
Patent abstract
A heat treating apparatus for heat treating a substrate by irradiating the substrate with light includes a heat treating chamber for receiving the substrate, a heating plate for preheating the substrate through a thermal diffuser plate, xenon flashlamps for heating the substrate preheated by the heating plate, to a treating temperature by irradiating the substrate with flashes of light, and a decompression mechanism for decompressing the heat treating chamber when the xenon flashlamps heat the substrate.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
