Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Geng Wang0
Kangguo Cheng0
Date of Patent
February 5, 2008
Patent Application Number
11306669
Date Filed
January 6, 2006
Patent Primary Examiner
Patent abstract
A trench device and method for fabricating same are provided. The trench device has a collar with a first portion that is doped and a second portion that is undoped. Fabrication of the partially doped collar can be done by deposition of a doped insulator in the trench, removal of a portion of the doped deposition, deposition of an undoped insulator in the trench and removal of a portion of the doped and undoped insulators.
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