Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Fei He0
Yue-Ying Lau0
Donald Umstadter0
Date of Patent
January 22, 2008
0Patent Application Number
107526040
Date Filed
January 7, 2004
0Patent Primary Examiner
Patent abstract
A method and apparatus to generate a beam of coherent light including x-rays or XUV by colliding a high-intensity laser pulse with an electron beam that is accelerated by a synchronized laser pulse. Applications include x-ray and EUV lithography, protein structural analysis, plasma diagnostics, x-ray diffraction, crack analysis, non-destructive testing, surface science and ultrafast science.
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