US Patent 7319527 Sensor with cantilever and optical resonator

Patent 7319527 was granted and assigned to University of Basel on January, 2008 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

University of Basel

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

73195270

Patent Inventor Names

Hans Joseph Hug0

Patrick Louis Theodorus Martin Frederix0

Date of Patent

January 15, 2008

Patent Application Number

105245060

Date Filed

August 14, 2002

Patent Primary Examiner

‌

Tarifur Chowdhury

Patent abstract

An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever (3) using an optical resonator between the cantilever (3) and an output surface (12b) of a lens assembly (10). In order to form the resonator, output surface (12b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly (10) and cantilever (3) comparatively large.