Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Li-Qun Xia0
Louis Yang0
Ping Xu0
Date of Patent
January 15, 2008
0Patent Application Number
115379280
Date Filed
October 2, 2006
0Patent Primary Examiner
Patent abstract
A method is provided for processing a substrate including providing a processing gas comprising an organosilicon compound comprising a phenyl group to the processing chamber, and reacting the processing gas to deposit a low k silicon carbide barrier layer useful as a barrier layer in damascene or dual damascene applications with low k dielectric materials.
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