Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dong-woo Lee0
Jin-sung Lee0
Tae-gyu Kim0
Date of Patent
January 8, 2008
0Patent Application Number
111565300
Date Filed
June 21, 2005
0Patent Primary Examiner
Patent abstract
Provided is a bake system. The bake system includes a heating plate having a heating plate having a substrate on an upper surface. A case is disposed below the heating plate to support the heating plate; a first cover is disposed above the heating plate and coupled to the case to form a chamber; and a second cover is disposed in the first cover, and directly above the substrate in the bake process for preventing heat convection on the substrate.
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