Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Won Wook Lee0
Date of Patent
January 8, 2008
0Patent Application Number
113215900
Date Filed
December 30, 2005
0Patent Primary Examiner
Patent abstract
Disclosed herein is a method for manufacturing a semiconductor device. According to the present invention, a device isolation film having a step difference occurring during a process of forming a device isolation film in a scribe lane region serves as a first alignment key, and a second alignment key formed during a process of forming a recess gate region is used in the subsequent process, thereby improving the process steps and product cost.
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