Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Koji Egashira0
Yuji Kamikawa0
Date of Patent
January 1, 2008
0Patent Application Number
098011060
Date Filed
February 28, 2001
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A liquid processing apparatus includes containers 26, 27, 26a, 26b surrounding processing chambers 51, 52 for accommodating a plurality of wafers W and nozzles 54, 56 for supplying a processing liquid to the substrates W in order to perform a liquid process. The nozzles 54, 56 are respectively equipped with a plurality of ejecting orifices 53, 55 capable of ejecting the processing liquid in a plane manner, allowing the substrates W to be processed uniformly and effectively.
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