Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideki Nakamori0
Tomoyuki Nakada0
Touru Sumiya0
Yoshihiko Ohkawara0
Akitaka Tsunogae0
Masaaki Kusumi0
Michio Okano0
Mitsuru Ohno0
...
Date of Patent
November 27, 2007
0Patent Application Number
106897540
Date Filed
October 20, 2003
0Patent Primary Examiner
Patent abstract
In a magnetic sensor (1) including a substrate (10) having a magnetism-sensitive element (11) formed thereon, a hard membrane (14) is formed on the outermost surface, an organic film (13) to relieve the stress caused by the hard membrane (14) is formed under the hard membrane (14), and an inorganic film (12) to relieve the stress caused by the organic film (13) is formed between the organic film (13) and magnetism-sensitive element (11). Also, an intermediate film formed from an element having a large force of bonding to carbon may be formed between the organic film (13) and hard membrane (14). Thus, the magnetic sensor (MR sensor, for example) can be protected against an external shock.
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