US Patent 7299538 Method for fabricating micro-electro-mechanical systems

Patent 7299538 was granted and assigned to WiSpry on November, 2007 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

WiSpry

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

72995380

Patent Inventor Names

Svetlana Tactic-Lucic0

Date of Patent

November 27, 2007

Patent Application Number

109667950

Date Filed

October 14, 2004

Patent Primary Examiner

‌

A. Dexter Tugbang

Patent abstract

The present invention relates to micro-electro-mechanical systems (MEMS). The present invention relates to a design feature that allows lower actuation voltage for electrostatically actuated structures (i.e., switches or mirrors). The present invention further relates to a method for fabricating such a design that allows lower actuation voltage.