Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
David H. Quach0
Martin Jeff Salinas0
Date of Patent
November 20, 2007
0Patent Application Number
111747810
Date Filed
July 5, 2005
0Patent Primary Examiner
Patent abstract
An integrated thermal unit comprises a bake station comprising a bake plate configured to hold and heat a substrate; a chill station comprising a chill plate configured to hold and cool a substrate; and a substrate transfer shuttle configured to transfer substrates from the bake plate to the chill plate along a horizontally linear path within the thermal unit and raise and lower substrates along a vertical path within the integrated thermal unit.
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