US Patent 7297625 Group III-V crystal and manufacturing method thereof

Patent 7297625 was granted and assigned to Sumitomo Electric Industries on November, 2007 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Sumitomo Electric Industries

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

72976250

Date of Patent

November 20, 2007

Patent Application Number

105210600

Date Filed

April 1, 2004

Patent Primary Examiner

‌

Thao P. Le

Patent abstract

A method of manufacturing a group III-V crystal is made available by which good-quality group III-V crystals are easily obtained at low cost without causing cracks, even when using a variety of substrates. A method of manufacturing a group III-V crystal, characterized in including: a step of depositing a metal film (2) on a substrate (1); a step of heat-treating the metal film (2) in an atmosphere in which a patterning compound is present; and a step of growing a group III-V crystal (4) on the metal film after the heat treatment. Additionally, a method of manufacturing a group III-V crystal, characterized in including: a step of growing a group III-V compound buffer film on the metal film after the heat treatment; and a step of growing a group III-V crystal on the group III-V compound buffer film.