US Patent 7295015 Ionization gauge
Patent 7295015 was granted and assigned to Brooks Automation on November, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 14, 2006
0
Date of Patent
November 13, 2007
0
Patent Application Number
11354278
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Patent Inventor Names
Paul C. Arnold
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Paul M. Rutt
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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