Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masami Murai0
Date of Patent
November 6, 2007
0Patent Application Number
105178400
Date Filed
June 24, 2003
0Patent Primary Examiner
Patent abstract
Provided are a piezoelectric element and a liquid-jet head using the same, in which favorable crystallinity can be obtained with improved uniformity, breakage of a piezoelectric film can be prevented, thereby providing stable displacement properties. The piezoeletric element includes a lower electrode, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film. The piezoelectric film in turn includes a lower layer portion having column crystals, and an upper layer portion having column crystals which are continuous from those in the lower layer portion and having sizes larger than those in the lower layer portion.
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