Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
October 30, 2007
Patent Application Number
10981316
Date Filed
November 4, 2004
Patent Primary Examiner
Patent abstract
In general, in one aspect, the invention features a method that includes monitoring a position of a stage along a first measurement axis and a second measurement axis of a multi-axis interferometry system and determining a position of the stage with respect to another degree of freedom based on the monitored positions along the first and second axes and predetermined information about how the measurement axes deviate from being parallel to one another.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
