Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
October 30, 2007
Patent Application Number
10474818
Date Filed
April 12, 2002
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention uses low temperature co-fired ceramic (LTCC) technology for fabrication of micro-electro-mechnical systems (MEMS) based phase shifters. As a result, low-cost subarray modules can be constructed using LTCC, and the subarray modules (10) can be used as building blocks for large antenna arrays. In an exemplary description of the present invention, all layers of the multilayer subarray modules, including MEMS, are in LTCC. As a result, a significant cost reduction for satellite terminals using highly integrated LTCC subarray modules.
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