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US Patent 7287418 Method of measuring interfacial adhesion properties of electronic structures

Patent 7287418 was granted and assigned to Hysitron, Inc. on October, 2007 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
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Hysitron, Inc.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
72874180
Patent Inventor Names
Dehua Yang0
Thomas J. Wyrobek0
Richard J. Nay0
David J. Vodnick0
Date of Patent
October 30, 2007
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Patent Application Number
113161420
Date Filed
December 22, 2005
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Patent Citations Received
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US Patent 12027343 Real-time direct measurement of mechanical properties in-situ of scanning beam microscope
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Patent Primary Examiner
Hezron Williams
Hezron Williams
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Patent abstract

A method for measuring toughness of interfacial adhesion including applying a normal force with a probe to a surface of a coating joined to a major surface of a substrate of an electronic structure, wherein the surface is substantially parallel to the major surface, and applying a lateral force to the coating with the probe by laterally moving a position of the probe relative to the major surface such that the probe forms at least one delaminated region in the coating as the position of the probe moves laterally across the major surface, the delaminated region having a starting point and an ending point. The method further includes measuring a magnitude of the lateral force over time, and determining a toughness of interfacial adhesion between the coating and the major surface based on changes in magnitude of the lateral force as the position of the probe moves from the starting point to ending point.

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