US Patent 7280223 Interferometry systems and methods of using interferometry systems
Patent 7280223 was granted and assigned to Zygo on October, 2007 by the United States Patent and Trademark Office.
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In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a first parameter and a second parameter for different positions of the measurement object from the monitored distances, wherein for a given position the first parameter is based on the monitored distances of the measurement object along each of the three different measurement axes at the given position, and for a given position the second parameter is based on the monitored distance of the measurement object along each of two of the measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from the first and second parameter values.
US Patent 07280223 Interferometry systems and methods of using interferometry systems US Patent 7280223 Interferometry systems and methods of using interferometry systems
US Patent 07280223 Interferometry systems and methods of using interferometry systems
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