Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 2, 2007
Patent Application Number
10809021
Date Filed
March 24, 2004
Patent Primary Examiner
Patent abstract
A load-lock system includes a load-lock chamber arranged between a storage port which stores a substrate and a process chamber which processes the substrate in a process space maintained at a pressure lower than that in the storage port, and a dehumidifying unit which forms a dehumidified environment in the load-lock chamber. A system preferably includes another chamber between said storage port and said load-lock chamber, wherein said dehumidifying unit dehumidifies said another chamber.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
