Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 2, 2007
Patent Application Number
11195363
Date Filed
August 2, 2005
Patent Primary Examiner
Patent abstract
A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.
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