Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dov Furman0
Efraim Miklatzky0
Noam Dotan0
Date of Patent
September 25, 2007
0Patent Application Number
111768440
Date Filed
July 6, 2005
0Patent Primary Examiner
Patent abstract
An inspection system for inspecting an object, the system comprising an illuminator including at least one pulsed light source, a detector assembly, and a relative motion provider operative to provide motion of the object relative to the detector assembly, along an axis of motion, the detector assembly comprising a plurality of 2-dimensional detector units whose active areas are arranged at intervals.
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